FPD, LCD & Solar Atmospheric Robots


  • Wide variety of versions

  • High speed with maximum throughput

  • New motion commands
  • Fast substrate alignment method
  • Excellent straight-line accuracy

  • AC Servo motors with aboslute encoders


  • Small Substrate Handlers — SR814X Series:

  • Suitable for substrate sizes from 360 x 460 mm² up to 1100 x 1300 mm²
  • Medium Substrate Handlers — SR814X Series:

  • SR818X Series: Suitable for substrate sizes from 730 x 920 mm² up to 1000 x 1300 mm²
  • SR8145: up to 1500 x 1850 mm²
  • Large Substrate Handlers — SR814X Series:

  • Suitable for 6th, 7.5th and 8th generation substrate sizes



 

 

LCD Handling

Sankyo is a pioneer in the development of LCD handling robots and is regarded as an expert in this field with its exceptional atmospheric and vacuum clean room robot technology.


Today, Sankyo is a world leader in LCD handling, especially large size substrate handling, and the product lineup covers different kind of robots for atmospheric and vacuum environments as well as complete handling solutions with cassette stations, Host Interfaces, etc.