200mm SMIF LOADER




Table Top Model


  • Allows Simple Operation as well as Quick and Smooth Open/Close

  • Open Time: Less than 11sec. (min. 7sec.)
  • Close Time: Less than 12sec. (min. 8sec.)
  • Equipped with Excellent Safety Features:

  • Wafer Protrusion Sensor
  • Over Access Sensor (over 3.5kgf)
  • Z-Axis Areas Sensor (optional)
  • Exhaust Fan Monitor Sensor
  • EMO (Emergency Off) Button
  • MCB (5A, 30mA) and Circuit Protector(1.5A)
  • Simple Indicator LEDs:

  • READY, POD IN PLACE, ERROR

  • Minimal Vibration and Excellent Cleanliness

  • Efficient Exhaust and Bottom Located Fan

  • Compact and Light Weight





Equipment Built-In Model


  • Allows Quick and Smooth Open/Close

  • Open/Close Time: 11.5 sec.
  • Equipped with Excellent Safety Features:

  • Wafer Protrusion Sensor with Wafer Push Back Mechanism
  • Excessive Wafer Out Detection
  • "Shell Lock Function" with Manual Release
  • Abnormal Operation and Immediate Power Lost Detection
  • Large LED Status Indicators:

  • POWER, READY, POD IN PLACE, ERROR

  • Minimal Vibration and Excellent Cleanliness



 

 

Semiconductor Handling

It is our mission to provide all handling components and proper integration needed for Semiconductor Tool Automation.

The range of products that we provide cover all components used for the entire Front End Handling (EFEM), such as atmospheric robots, prealigner, load ports, wafer ID reader, etc. as well as all handling equipment needed for process tool automation such as atmospheric or vacuum robots. These products are available either as individual handling component or in any combination needed.

A single interface providing communication with all components allows our customers to concentrate on their core business with the knowledge that all handling requirements are well controlled and all components are perfectly coordinated.