Chuck Type Prealigner

  • Applicable for a wode variety of applications:

  • Wafer Size: 200mm, 300mm, and parallel operation of 200mm/300mm wafers;
    Usage of 2 sensors (CCDs) for 200mm/300mm parallel operation allows fast alignment and does not require any change over modification

  • End-Effector: Horse-shoe type and pen type operation possible;
    Optional lifting pins for pen type end-effector
  • Superior Cleanliness (ISO Class 1)



Model 300
Wafer Size 200mm and/or 300mm
Allowable Range +/- 10mm
Alignment Accuracy  
      Orientation +/- 0.1deg
      X/Y +/- 0.05mm
Alignment Time < 6sec
Utility DC24V +/_ 5%, less than 3A
Wafer Edge Sensor CCD
Sensor Light LED
Cleanliness ISO Class 1

 

 

Semiconductor Handling

It is our mission to provide all handling components and proper integration needed for Semiconductor Tool Automation.

The range of products that we provide cover all components used for the entire Front End Handling (EFEM), such as atmospheric robots, prealigner, load ports, wafer ID reader, etc. as well as all handling equipment needed for process tool automation such as atmospheric or vacuum robots. These products are available either as individual handling component or in any combination needed.

A single interface providing communication with all components allows our customers to concentrate on their core business with the knowledge that all handling requirements are well controlled and all components are perfectly coordinated.