Single Load Port, Multi-Carrier

Compatible with Wafer, Hoop Ring and FFC Cassettes


  • Bolt Interface — Exchangeable with 300mm FOUP Load Ports

  • Multi-Carrier compatible by carrier adapter use:

  • 150mm / 200mm Wafer (SEMI Standard)

  • 150mm / 200mm FFC (Tape Frame)
  • 150mm / 200mm Hoop Ring
  • Automatic Identification of all above mentioned carriers

  • Universal Mapping Arm

  • Ideal for Mid– and Back-End Processes



 

 

Semiconductor Handling

It is our mission to provide all handling components and proper integration needed for Semiconductor Tool Automation.

The range of products that we provide cover all components used for the entire Front End Handling (EFEM), such as atmospheric robots, prealigner, load ports, wafer ID reader, etc. as well as all handling equipment needed for process tool automation such as atmospheric or vacuum robots. These products are available either as individual handling component or in any combination needed.

A single interface providing communication with all components allows our customers to concentrate on their core business with the knowledge that all handling requirements are well controlled and all components are perfectly coordinated.