End-Effector for Nidec and JEL Robot Systems

End-Effector for Nidec and JEL Robot Systems

Key Features

Various configuration applicable for Nidec and JEL robot systems

Vacuum End-Effector for 100mm, 200mm and 300mm wafer size
- Y- Shape and Pen-Type
Passive Edge and Edge-Grip Type for 200mm and 300mm wafer size
Bernoullie End-Effector

Description

JEL Bernoullie End-Effector: Depending on the wafer, different pad types are available

Bernoullie Pad Type
- Applicable for thin and warped wafers
- Thin end-effector design possible
Cyclone Pad Type (2.5mm thickness and 25mm diameter)
- Stronger wafer holding force compared to Bernoullie Pad Type
- Available for Bernoullie type pre-aligner

Category: Accessories

Technical Data

Bernoullie End-Effector – None Contact Type

Material
- Aluminum
Surface treatment
- Black alumite
Wafer holding
- By the Bernoulli’s principle using Cyclone pad and guide (PEEK)
- Various materials available for the contact area
Utility
- 30 to 80 L/min
- (Varies depending on the wafer condition)

Bernoullie End-Effector – Contact Type

Material
- Aluminum
Surface treatment
- Black alumite
Wafer holding
- By the Bernoulli’s principle using Cyclone pad and friction rubber (H-NBR)
- Various materials available for the contact area
Utility
- 30 to 80 L/min
- (Varies depending on the wafer condition)

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