2-Link Cylindrical

2-Link Cylindrical

Key Features

JEL SVCR 3-Axis Cylindrical Coordinate Vacuum Robot Series

Variety of versions:
- Arm Lenght of 160mm, 190mm, 260mm and 330mm
- Vertical Stroke of 20mm and 40mm
Passive edge or edge grip type of end-effectors

Description

2kg payload (calculated for the 3rd joint on the arm)
Vacuum Level and Sealing: 10-6Pa; Magnetic fluid sealing for arm joints and bellow
Economic stepping motor control (or servo motors)

Category: Vacuum

Technical Data

Model: SVOR3160-020-PM

Functionality:

Carrying Object: Wafer up to 300mm
Wafer Holding Method: By end-effector with passive edge or edge grip type end-effector
Robot Model Type: Cylindrical coordinate type
Control Axis: 3-axis
Motor Type: Stepping motor
Operating Range:
- 3rd joint center: 320mm
- Rotation Angle (Theta-axis): 330deg
- Vertical Stroke (Z-axis): 20mm
Carrying Speed:
- Arm (R-axis): 300mm/sec
- Rotation Angle (Theta-axis): 120deg/sec
- Vertical Stroke (Z-axis): 20mm/sec
Repeatability: Within ±0.1 mm
Cleanliness: Magnetic fluid sealing and filter
Vacuum resistance: 1.33×10 Pa
Mass: Approx. 25kg
Utility: DC24V±10% 8A

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