2-Link Multi Joint

JEL GTVCR 5-Axis Multi-Joint Vacuum Robot Series

Suitalbe for in-line layouts – Possible to load/unload in-line (prallel) mounted stages
High throughput by using twin end-effectors (on single arm)
Variety of Configurations
- Single and Twin End-Effector
- 280mm and 330mm Arm Length (60m Vertical Stroke)
- Friction (O-Ring type), Passive Edge and Edge Grip Type End-Effector

4kg payload (calculated for the 3rd joint on the arm)
Vacuum Level and Sealing: 10-6Pa; Magnetic fluid sealing for arm joints and bellow
AC Servo Motors with Absolute Encoders

Category: Vacuum

Technical Data

Carrying Object: Wafer up to 300mm
Robot Model Type: Horizontal and multi-joint type
Control Axis: 5-axis
Motor Type: AC servo motor
Operating Range:
- 3rd Joint Center: 635mm
- Rotation Angle (Theta-axis): 360deg
- Vertical Stroke (Z-axis): 60mm
Carrying Speed (Ave.):
- Arm (R-axis): 640mm/sec
- Rotation Angle (Theta-axis): 160deg/sec
- Vertical Stroke (Z-axis): 60mm/sec
Carrying Speed (Max.):
- Arm (R-axis): 950mm/sec
- Rotation Angle (Theta-axis): 200deg/sec
- Vertical Stroke (Z-axis): 85mm/sec
Resolution:
- 1st Joint Axis (J1-axis): 0.00081 deg
- 2nd Joint Axis (J2-axis): 0.00081 deg
- 3rd Joint Axis (J3-axis): 0.00072 deg
- 3rd Joint Axis (J5-axis): 0.00072 deg
- Z-Axis (J4-axis): 0.98μm
Repeatability: Within ±0.1 mm
Handling Level: 219mm (Mounting level to upper end-effector level)
Cleanliness: Magnetic fluid sealing and filter
Vacuum resistance: 1 x 10 Pa
Utility: Power: AC200 to 230V 2kVA 50/60Hz

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