Technical Data

Model: GTFR5280-320-DM

Functionality:

• Carrying Object: Up to 300 mm silicon wafer
• Wafer Holding Method: By vacuum suction
• Robot Model Type: Horizontal and multi-joint type
• Control Axis: 5-axis
• Motor Type: AC servo motor (Batteryless)
• Operating Range:
  • From the robot center to the wafer center:
    • Vertical Stroke (Z-axis): 320 mm
• Carrying Speed (Ave.):
  • Arm (R-axis): 900 mm/sec (when cylindrical operation)
  • Vertical Stroke (Z-axis): 320 mm/sec
• Carrying Speed (Max.):
  • Arm (R-axis): 1,500 mm/sec (when cylindrical operation)
  • Vertical Stroke (Z-axis): 540 mm/sec
• Repeatability: Within ±0.05 mm
• Cleanliness: ISO Class 1
• Utility: Power: AC200V Single phase ±10% 2 kVA; Vacuum: -75 kPa or more
• Mass: Approx. 80 kg