3-Link Multi Joint

3-Link Multi Joint

Key Features

Nidec SR824x Wafer Handling Robot Series – Unique 3-Link Robot design enables access to up to 5 Load Ports without using linear track axis

Small installation space – Wide working area
400mm, and optional 470mm as well as 800mm, vertical stoke
Supinator version available (Flip-Axis)
Bottom and side (hanging) mounting interface

Description

Optional Universal Hand Adapter allows easy exchange / use of:
- 200 / 300mm Edge-Grip End Effectors
- 200 / 300mm Vacuum End Effectors
- any End Effector combination
Optional Flip-Axis (Supinator) on upper hand can reach any position between -10 and 280 degrees

Category: Atmospheric

Technical Data

Model: SR8241-3xxx

Functionality:

Deg. of Freedom:
- 5-Axis (All AC Servo Controlled)
Working Range
- X-Axis: 685 mm….-685 mm
- Z-Axis: Arm Length: 350 mm 400 mm (470 & 800mm)
- Theta-Axis: ±170 deg
- Roll-Axis (1/2):
  - Rel. Angle Roll1 / Roll2: ±165 deg
  - Rel. Angle 3rd Arm / Roll: ±275 deg
Maximum Speed
- X-Axis: 1709mm/s
- Z-Axis: 700 mm/s
- Theta-Axis: 6.54 rad/s
- Roll-Axis (1/2): 9.42 rad/s
Repeatability: ±0.05mm (ISO 9283)
Payload: 2 kg (each EE) Weight: 75 kg
Cleanliness: ISO Class1

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