AutoSwitch Load Port

AutoSwitch Load Port

Key Features

Handling 200mm Open Cassette at 300mm FOUP Load Port

Allows an easy switch-over between 200mm Open Cassette and 300mm FOUP without any modifications
Automatic carrier identification function
Automatic mapping for either wafer size

Description

Allows an easy switch-over between 200mm Open Cassette and 300mm FOUP without any modifications
Prevention Mechanism for Wafer Protrusion:
- Vertical wafer placement by operator
- Stabilizing stage rotation with damper function
Prevention Mechanism for Incorrect Pick Up:
- FOUP Clump structure (SEMI Standard) clumps open cassette during Adaptor Stage Close motion
Applicable for SELOP-8.1 Load Ports

Category: Front End

Technical Data

Model: KIT-SELOP08C25T Series

Applicable Load Port:

SELOP-8.1 Load Port (other models to be verified)

Dimensions (Tilt Version):

Width: 455mm; Depth: 300mm; Height: 432mm (adapter only)

Kit Weight:

12.5kg

Features:

In combination with SELOP-8.1:
- Open Cassette normal placement sensor
- Stage normal placement sensor
- Wafer Mapping
- Wafer Protrusion Sensor
- Hand Safety Sensor
- Neck Safety Sensor

Standard Functions:

Wafer side-slip prevention
300mm FOUP Infopad pin holder
Stage fixation at wafer horizontal position
Stabilizing vibration in rotation and dock motion

Applicable OC (Open Cassette):

8-inch Open Cassette (cassette specification needed at inquiry)

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