Technical Data
Model: SU120-00D1-407
Functionality:
- Wafer Size: 200mm or 300mm, Automatic Changeover
- Degree of Freedom: 1 Axis (AC Servo with ABS Enc.)
- Alignment Accuracy:
- Center Offset: ±0.05mm (Measurement Acc.)
- Angular Offset: ±0.07deg
- Alignment Time: 2.5sec
- Max. Speed: 12.22rad/sec
- Working Range: 0 to 720deg
- Wafer Contact Material: Peek (PK-450)
- Cleanliness: ISO Class 1
- Weight: 9kg
