Key Features

Nidec is a world leader in LCD handling, especially large size substrate handling. The product lineup covers different kind of robots for atmospheric and vacuum environments as well as complete handling solutions with cassette stations, Host Interfaces, etc.

• Wide variety of versions
• High Speed – Maximum Throughput: Fast substrate alignment method
• Excellent straight-line accuracy – AC Servo motors with aboslute encoders

Description

Atmospheric Handling

• Small Substrate Handlers — SR814X Series:
  • Suitable for substrate sizes from 360 x 460 mm² up to 1100 x 1300 mm²
• Medium Substrate Handlers — SR814X Series:
  • SR818X Series: Suitable for substrate sizes from 730 x 920 mm² up to 1000 x 1300 mm²
  • SR8145: up to 1500 x 1850 mm²
• Large Substrate Handlers — SR814X Series:
  • Suitable for 6th to 10th generation substrate sizes