N2 Purge Load Port

N2 Purge Load Port

Key Features

Superior stable N2 purge by moveable nozzles (Patent granted)

Prevent cross contamination and surface oxidation
Control of nozzle up/down timing avoids interference with Kinematic Pins during FOUP placement
Compatibility with none-N2 purge applicable FOUPs

Description

N2 purging on carrier base
Adapted FOUP types: ENTEGRIS A-300, Spectra (4 Purge Port Type)
Superior stable placement
- Control nozzle upward timing
  - Compatibility of non-N2 purge applicable FOUPs
  - Interference avoidance with kinematic pin at FOUP placement
- Adjustment function of nozzle pressue
Nozzle up and down position checking function (Sensor)
N2 purging on carrier base
- Adapted FOUP Type: A-300, SPECTRA (4 Port Purge Type: 2 inlet, 2 outlet ports)
- Applicable to other N2 purge type FOUPs
Monitoring N2 gas flow rate by flow meter
Controlling N2 gas flow rate by MFC
Preventing contamination through purge port
- Gas-Filter at inlet port side
- Adhesion to grommet of FOUP side

Category: Front End

Technical Data

Model: SELOP12F25-S7-N Series

Functionality:

Application:
- Applicable to N2 (Nitrogen) purge FOUP: A300, SPECTRA (4 purge port type)
Status Functions:
- FOUP Sensors: presence, normal placement, door
- Wafer Sensors: mapping, protrusion
- Safety Sensors: Hand, Neck
- N2 Purge Nozzle: UP/DOWN; N2 gas flow rate
Moving Mechanism:
- Door (air cylinder): up/down, open/close, clump, latch key
- Wafer mapping (stepping motor): moving independently from door
- Expansion/Contraction: air cylinder
- Purge Timing Control: Controlled by Host Software
Door Holding:
- Vacuum absorption method
Standard Features:
- Wafer mapping
- Undock position adjustment (for OHT)
- BOLTS surface position adjustment
- Self-standing caster
N2 Purge:
- Tube fitting size: ⌀102 Swagelok or one-touch fitting
- Max. Flow amount: 200L/min.

Dimensions & Weight:

Dimensions: Width: 471mm; Depth: 590mm; Height: 1376mm
Weight: 70kg

Facilities:

Communication: RS232 (optional Ethernet)
Air: One-touch connection: 0.45-0.6MPa; 40NL/min.
Vacuum: One-touch connection: -40kPa; 5L/min.
Electricity: DC24V ±10%; 4A (DC24V); optional AC200V

Performance:

Speed:
- 12 seconds open/close; 14 seconds with mapping (open/close)
Positioning Accuracy: ±0.1mm on FOUP front/rear axis and on up/down axis

Options:

Customizable: Indicator Panel and Switch Panel

Features:

Carrier ID reader, Infopad (A, B, C, D), PIO
Applicable to Quartz Wafer and to AC200V
Ethernet Communication, Nozzle Measurement JIG

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