Passive Pre Aligner

Passive Pre Aligner

Key Features

Nidec Passive Pre-Aligner controlled by robot controller

Robot and Pre-Aligner share the same controller
Ultra clean due to edge contact only
Sophisticated software interface using same same command set as other Nidec (Sankyo) products
Compact and fast: Internal CPU used for pre-processing sensor data

Category: Accessories

Technical Data

Model: SU1120-00J1-501

Functionality:

Wafer Size: 300mm
Degree of Freedom: 1 Axis (AC Servo with ABS Enc.)
Alignment Accuracy:
- Center Offset: ±0.05mm (Measurement Acc.)
- Angular Offset: ±0.07deg
Alignment Time: 5sec (average)
Max. Speed:
- Positioning: 10.47rad/sec
- Search: 5.25rad/sec
Cleanliness: ISO Class 1
Wafer Contact Material: Perfluor
Light Source: Laser Class 1
Working Range: 0 to 720deg
Weight: 5.5kg

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