Technical Data

Model: SELOP08C25S Series

Functionality:

• Functionality and Application:
  • The product is applicable for SMIF POD (SEMI E19.4 Compliant).
  • It supports 200mm Si Wafer (SEMI M1 200mm without orientation flat).
  • Features FOUP sensors for presence, placement, and door status functions.
  • Wafer sensors include mapping and protrusion detection.
  • Safety sensors ensure robot clearance.
  • Moving mechanisms involve motor-driven actions like clamp/unclamp and latch/unlatch.
  • The SMIF POD door has specific hold characteristics.
  • Vacuum absorption methods are employed.
  • Standard features include self-standing casters and Type T & B Protocol support.
• Dimensions and Weight:
  • Width: 470mm
  • Depth: 485mm
  • Height: 1147mm
  • Weight: 50 kg
• Facilities and Performance:
  • Communication interfaces: RS232/Ethernet
  • Vacuum capability: One-touch connection (less than -60kPa, 5 L/min)
  • Electricity: DC24V±10%, full load current ≤ 5A
  • Speed: <11 sec SMIF POD Open (with Mapping), <8 sec SMIF POD CLOSE (with Mapping)
• Customization Options:
  • CID (Customized ID)
  • Optical Parallel IO