Description
EFEMs for 200, 300 & 450mm Applications
Our EFEMs, compatible with 200mm, 300mm, and 450mm applications, feature the versatile Common Model Robot. Offering exceptional cleanliness (ISO Class 1) and high reliability with impressive throughput, our solution ensures precision with ±0.05mm accuracy. Customize your setup with options like carrier (RFID) and wafer ID readers, pre-aligners, human-machine interfaces, ionizers, and EFEM controllers. Elevate your semiconductor manufacturing operations with our EFEMs and the Common Model Robot, delivering efficiency and precision in one powerful package.
- Wide variety of versions:
- 2, 3, 4 and 5 Load Port versions
- Superior Cleanliness (ISO Class 1)
- High Reliability with high Throughput at the same time
- Excellent Accuracy: Robot / Pre-Aligner: ±0.05mm
- Wide variety of options:
- 300mm, 200mm and bridge tool (200mm / 300mm) functionality
- Carrier (RFID) Reader
- Wafer ID Reader
- Pre-Aligner
- Human Machine Interface
- Ionizer
- EFEM Controller
