Key Features:
JEL GTVCR 5-Axis Multi-Joint Vacuum Robot Series
- Suitalbe for in-line layouts – Possible to load/unload in-line (prallel) mounted stages
- High throughput by using twin end-effectors (on single arm)
- Variety of Configurations
- Single and Twin End-Effector
- 280mm and 330mm Arm Length (60m Vertical Stroke)
- Friction (O-Ring type), Passive Edge and Edge Grip Type End-Effector
Description
- 4kg payload (calculated for the 3rd joint on the arm)
- Vacuum Level and Sealing: 10-6Pa; Magnetic fluid sealing for arm joints and bellow
- AC Servo Motors with Absolute Encoders
Technical Data
Model: GTVCR5330-060-AM
Functionality:
- Carrying Object: Wafer up to 300mm
- Robot Model Type: Horizontal and multi-joint type
- Control Axis: 5-axis
- Motor Type: AC servo motor
- Operating Range:
- 3rd Joint Center: 635mm
- Rotation Angle (Theta-axis): 360deg
- Vertical Stroke (Z-axis): 60mm
- Carrying Speed (Ave.):
- Arm (R-axis): 640mm/sec
- Rotation Angle (Theta-axis): 160deg/sec
- Vertical Stroke (Z-axis): 60mm/sec
- Carrying Speed (Max.):
- Arm (R-axis): 950mm/sec
- Rotation Angle (Theta-axis): 200deg/sec
- Vertical Stroke (Z-axis): 85mm/sec
- Resolution:
- 1st Joint Axis (J1-axis): 0.00081 deg
- 2nd Joint Axis (J2-axis): 0.00081 deg
- 3rd Joint Axis (J3-axis): 0.00072 deg
- 3rd Joint Axis (J5-axis): 0.00072 deg
- Z-Axis (J4-axis): 0.98μm
- Repeatability: Within ±0.1 mm
- Handling Level: 219mm (Mounting level to upper end-effector level)
- Cleanliness: Magnetic fluid sealing and filter
- Vacuum resistance: 1 x 10 Pa
- Utility: Power: AC200 to 230V 2kVA 50/60Hz
No request information available.
