Key Features
Various configuration applicable for Nidec and JEL robot systems
- Vacuum End-Effector for 100mm, 200mm and 300mm wafer size
- Y- Shape and Pen-Type
- Passive Edge and Edge-Grip Type for 200mm and 300mm wafer size
- Bernoullie End-Effector
Description
JEL Bernoullie End-Effector: Depending on the wafer, different pad types are available
- Bernoullie Pad Type
- Applicable for thin and warped wafers
- Thin end-effector design possible
- Cyclone Pad Type (2.5mm thickness and 25mm diameter)
- Stronger wafer holding force compared to Bernoullie Pad Type
- Available for Bernoullie type pre-aligner
Technical Data
Bernoullie End-Effector - None Contact Type- Material
- Aluminum
- Surface treatment
-
- Black alumite
- Wafer holding
-
- By the Bernoulli's principle using Cyclone pad and guide (PEEK)
- Various materials available for the contact area
- Utility
-
- 30 to 80 L/min
- (Varies depending on the wafer condition)
- Material
-
- Aluminum
- Surface treatment
-
- Black alumite
- Wafer holding
-
- By the Bernoulli's principle using Cyclone pad and friction rubber (H-NBR)
- Various materials available for the contact area
- Utility
-
- 30 to 80 L/min
- (Varies depending on the wafer condition)
No request information available.