Key Features
Allows the use of a 380mm Tape Frame Open Cassette on a Tape Frame SELOP-8.1 Load Port (SEMI E63)
- Full safety with Door Lock and Protrusion functionality
- Cassette Placement and Door Close detection
- Designed to prevent placing unlocked cassettes
- Load Port mapping
- 380mm Tape Frame FOUP operation without any modification is always possible with full functionality by simply using a 13-slot Tape Frame FOUP instead of the OCA
Description
- The horizontal door mechanism allows easy access to place the open cassette
- Applicable for SEMI E63 Tape Frame SELOP-8.1 Load Port (13-slot)
- Applicable OC (Open Cassettes)
- 15-inch (cassette specification needed at inquiry)
Technical Data
Standard Functions in Combination with SEMI E63 Tape Frame SELOP-8.1 (13-slot)
Optional available for SEMI E184 Tape Frame SELOP-8.1 (25-slot)
- Open Cassette placement sensor
- Door Lock
- Wafer Mapping
- Wafer Protrusion Sensor
- Hand Safety Sensor
- Neck Safety Sensor
No request information available.
