Integrated Front End Module (iFEM)

Key Features

Concept:

• Turn-key Front End Handling unit incorporated into Equipment (Process Tool)
• Same functionality/performance as standard EFEMs due to the use of the same key components such as robot, load ports, etc.

Advantages

• Cost Savings by avoiding redundancy (iFEM and process tool are sharing same minienvironment, safety features, etc.) and by reducing footprint
• High Design Flexibility — Corporate Design easily achievable
• High Reliability and Performance
• Variety of Potential Configurations