Open Cassette Adapter – Multi Wafer Size

Key Features

Allows an easy switch-over between 100mm, 150mm and 200mm open cassettes on a 300mm SELOP-8.1 Load Port

• Full safety with Door Lock and Wafer Protrusion functionality
• Cassette Placement detection for all cassette sizes
• Load Port mapping sensor adjustable for all three sizes 100mm, 150mm and 200mm (300mm no adjustments needed)
• 300mm operation without any modification is always possible with full functionality by simply using a SEMI
• Standard FOUP instead of the OCA

Description

• Open Cassette Adapter allows the use of smaller wafer sizes on the 300mm SELOP-8.1 SEMI standard Load Port
• By easy manual exchange of a few parts, the OCA can be used for 100mm, 150mm and 200mm open cassettes
• The tilt door mechanism and door closing damper prevent wafer from sliding out of the cassette
• Applicable for SELOP-8.1 Load Port
• Applicable OC (Open Cassettes): 4-inch, 6-inch and 8-inch (cassette specification needed at inquiry)