Key Features
Handling 200mm Open Cassette at 300mm FOUP Load Port
- Allows an easy switch-over between 200mm Open Cassette and 300mm FOUP without any modifications
- Automatic carrier identification function
- Automatic mapping for either wafer size
Description
- Allows an easy switch-over between 200mm Open Cassette and 300mm FOUP without any modifications
- Prevention Mechanism for Wafer Protrusion:
- Vertical wafer placement by operator
- Stabilizing stage rotation with damper function
- Prevention Mechanism for Incorrect Pick Up:
- FOUP Clump structure (SEMI Standard) clumps open cassette during Adaptor Stage Close
motion
- FOUP Clump structure (SEMI Standard) clumps open cassette during Adaptor Stage Close
- Applicable for SELOP-8.1 Load Ports
Technical Data
Model: KIT-SELOP08C25T Series
Applicable Load Port:
- SELOP-8.1 Load Port (other models to be verified)
Dimensions (Tilt Version):
- Width: 455mm; Depth: 300mm; Height: 432mm (adapter only)
Kit Weight:
- 12.5kg
Features:
- In combination with SELOP-8.1:
- Open Cassette normal placement sensor
- Stage normal placement sensor
- Wafer Mapping
- Wafer Protrusion Sensor
- Hand Safety Sensor
- Neck Safety Sensor
Standard Functions:
- Wafer side-slip prevention
- 300mm FOUP Infopad pin holder
- Stage fixation at wafer horizontal position
- Stabilizing vibration in rotation and dock motion
Applicable OC (Open Cassette):
- 8-inch Open Cassette (cassette specification needed at inquiry)
No request information available.
