Key Features
Contribution to high throughput automation for 200mm process lines
- Fuly compaible with 300mm BOLTS-M installation
- OHT transfer applicable – Secure SEMI E15 C2 distance
- Mapping functionality – Single/Double/Cross detection
- Ethernet/RS-323C Applicable: High performance, high reliability control system; PIO option compatible
Description
Contribution to high throughput automation for 200mm process lines
- Fuly compaible with 300mm BOLTS-M installation
- OHT transfer applicable – Secure SEMI E15 C2 distance
- Mapping functionality – Single/Double/Cross detection
- Ethernet/RS-323C Applicable: High performance, high reliability control system; PIO option compatible
Technical Data
Model: SELOP08C25S Series
Functionality:
- Functionality and Application:
- The product is applicable for SMIF POD (SEMI E19.4 Compliant).
- It supports 200mm Si Wafer (SEMI M1 200mm without orientation flat).
- Features FOUP sensors for presence, placement, and door status functions.
- Wafer sensors include mapping and protrusion detection.
- Safety sensors ensure robot clearance.
- Moving mechanisms involve motor-driven actions like clamp/unclamp and latch/unlatch.
- The SMIF POD door has specific hold characteristics.
- Vacuum absorption methods are employed.
- Standard features include self-standing casters and Type T & B Protocol support.
- Dimensions and Weight:
- Width: 470mm
- Depth: 485mm
- Height: 1147mm
- Weight: 50 kg
- Facilities and Performance:
- Communication interfaces: RS232/Ethernet
- Vacuum capability: One-touch connection (less than -60kPa, 5 L/min)
- Electricity: DC24V±10%, full load current ≤ 5A
- Speed: <11 sec SMIF POD Open (with Mapping), <8 sec SMIF POD CLOSE (with Mapping)
- Customization Options:
- CID (Customized ID)
- Optical Parallel IO
No request information available.
